New series of transducer type "G-RTAN series Multi Ionization Gauge" that is capable of connection to differet type sensor heads.
This product, which is a triode type ionization gauge, is capable of longer life stable measurement in harsh environment for vacuum gauges because of low deterioration of sensitivity.
Improved to be more user-friendly taking over the concept of long-life and low running cost.
This product, which is a triode type ionization gauge, is capable of longer life stable measurement in harsh environment for vacuum gauges because of low deterioration of sensitivity.
Improved to be more user-friendly taking over the concept of long-life and low running cost.
Features
- ULVAC own concept: Capable of connection of different measurement range sensor heads according to application.
- Compact: Significantly miniaturized compared to the previous series (56% reduction of controller volume). World’s smallest class.
- High usability: Set point setting, condition check, etc. by connecting PC/Android.
- Larger selection: EtherCAT spec to be available in addition to analog output spec and serial communication spec.
- World's first metal type triode ionization gauge: Long life even if in harsh environment and no worry of such damage as glass type.
- Filament life notification function: An advance warning can be made before the life of ionization vacuum gauge by watching flilament power.
- Wide range measuremnt: Measurment from atmospheric pressure to ultra figh vacuum (1 x 10+5 to 1 x 10-5Pa) is possible (when using with an optional unit SWU10-R).
- Precise atmospheric pressure sensing: Atmospheric pressure check for chamber open is available (when using with an optional unit SAU).
Applications
- Ultimate pressure check or process control for vacuum equipment for OLED touch panels.
- Ultimate pressure check for industial vacuum equipment such as vacuum furnaces.
- Measurement in hydrocarbon rich atmosphere.
- In case that replacement cycle of sesnosr head is required.
*Please contact in case of using corrosive gases (halogen gases).
Specifications
| Model | ST200-A | ST200-R | ST200-E (scheduled for release) |
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| Type | Analog output type | Serial communication type | EtherCAT communication type | |
| Applicable ionization gauge sensor head |
SWT-16(NW16), SWT-25(NW25) | |||
| Connectable sensors | Multi ionization gauge ST200: 1 Pirani vacuum gauge sensor unit SWU10-R: 1 (option) Pressure sensro unit SAU: 1 (option) |
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| Repeatability(N2) | ST200 simple mode: ±2％ | |||
| Sampling time | 60 ms, 5x moving average | |||
| Value output | Output voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade Pressure conversion equation: V=7.25+0.75×(LogP-2) P=10^{(V-7.25)/0.75+2} |
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| Update time | 60msec | |||
| Control input signals | FIL ON/OFF、FIL 1/2、DEGAS ON/OFFOperates with open collector input, negative logic | - | - | |
| Control output signals | Sensor error, Setpoint 1/2/3, Emission valid Watch of electric power of filament Rating: 24VMAX、50mAMAX Saturation voltage:1V |
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| Communication type | - | RS232C/RS-485 | EtherCAT | |
| LED display | POWER: Power, ERROR LED (Blinking pattern and color change depending on each mode) | |||
| Emission current | 2mA (1×10-2Pa or lower), 10μA (1×10-2Pa or higher) | |||
| Degas Method | Electron bombard type 2mA, 330V | |||
| Maximum pressure of sensor | 2×10+5Pa (1.5 x 10+3 Torr, 2 x 10+3 mbar) (Absolute pressure) | |||
| Internal volume of sensor | 17cm3(SWT-16), 19cm3(SWT-25) | |||
| Operating temperature range | 10 to 50℃ (50 to 122℉) | |||
| Operating humidity range | 15 to 80% (not condensing) | |||
| Storage temperature | -20 to 65℃ (-4 to 149℉) (At non-energizing, not condensing) | |||
| IP rating | IP30 | |||
| Power supply voltage | DC20 to 28V (Ripple, Noise 1% or less) Lower than 8W |
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| Input/output connector | D-sub15-pin (M2.6 screw) | |||
| Weight | Sensor unit: approx. 280g, sensor head(SWT-16, SWT-25): 80g | |||
| Dimension W x D x H | 69mm×63mm×90mm (sensor unit only) | |||
| Applicable standard | CE | |||
| Option | Multi Ionization Gauge Sensor head | SWT-16（NW16）, SWT-25（NW25） Material of gas contacting sections: Filament 1, 2 -Ir/Y2O3 Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating |
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| Pirani Vacuum Gauge | SWU10-R *Previous model SPU also available | |||
| Pirani Vacuum Gauge Sensor head | SWP-16(NW16), SWP-25(NW25), SWP-R1/8(R1/8), SWP-P18(Φ18 pipe end), SWP-P15(Φ15 pipe end), SWP-CF16(ICF034) Material of gas contacting sections : Filament-Pt, Other-BS/Ni plating, Ni, Solder |
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| Pressure switch | SAU(NW16) Material of gas contacting sections : SUS316L | |||
| Unit cable | GUC-200P (for SWU10-R) ：0.5m, 1m, 2m GUC-200A (for SAU) ：0.5m, 1m, 2m |
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| Display unit | 1CH：ISG1(DC24V) | |||
| Display cable | Cable betweeen ST200 and desiplay unit 2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m |
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| Connector | I/O connector (D-sub15-soket（M2.6mm screw)) | |||
| Others | Test certificate, Calibration certificate | |||
ST200 series have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SWU10-R), and triple combination mode with a multi ionization gauge, a pirani gauge (SWU10-R) and a pressure switch (SAU)
| Mode | ST200-A/ST200-R/ST200-E Simple mode |
ST200-A/ST200-R/ST200-E ＋SWU10-R Combination mode |
ST200-A/ST200-R/ST200-E ＋SWU10-R＋SAU Triple combination mode |
| Measurable pressure range | 1.0×10-5 to 1.0×10+1Pa | 1.0×10-5 to 1.0×10+5Pa | 1.0×10-5 to 1.0×10+5Pa |
| Accuracy | 1.0×10-4 to 3.0×10+0Pa： ±10% |
1.0×10-4 to 1.0×10+4Pa：±10% 1.0×10+4 to 1.0×10+5Pa：±20% |
1.0×10-4 to 1.0×10+4Pa：±10% 1.0×10+4 to 3.0×10+5Pa：±3%F.S.(3.0×10+3Pa･Base temperature: 25℃) |
| Connection image |  |
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| Measurable pressure range image | 
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Image of coneection with PC/smartphone
Application software "UL-MOBI"
| For PC | Download from ULVAC's website "ULVAC SHOWCASE" download center |
| For smartphone | Download from Google Play |
Compatible devices
| PC | Windows 10 64 bit or later |
| Smartphone | Android 6 or later, USB TypeC |