This unit can be easily mounted to existing equipment, and it achieves improvements in yield ratio and throughput at low cost.
Features
- High throughput
Makes high power input possible by reducing abnormal - Reduces substrate damage
Capable of reducing substrate damage caused by arcs - Inhibits substrate temperature
Capable of inhibiting substrate temperature compared to RF sputtering - Simple connectivity
Can be easily connected to existing equipment *1 - Variable inversion pulse frequency
Possible range: A2KH-25/50:1kHz to 20kHz, A2K-20K/40K:1kHz to 50kHz - Pulse synchronization system
Output pulses for multiple A2K units can be synchronized *2 *3 - Capable of large capacities through master/slave connections
Up to six A2K-20K/40K units can operate in parallel
Application: Pulse synchronization system
When cathodes are close in the same chamber and they are opposite of each other or when there is interference in the discharge of multiple A2K units, the A2K inversion pulse can be set to in-phase or reverse phase by using the phase control function to prevent discharge interference. *3 *4
*1：Can be connected to ULVAC DPG Series DC power supplies
*2：Pulse synchronization and parallel operation is not possible when using mixed A2KH-25,50 and A2K-20K, 40K units
*3：The A2KH-25/50 requires an external synchronization unit (PHSM/PHSS)
*4：The A2K-20K/40K is only capable of in-phase phase control
Applications
- Reactive sputtering equipment for FPD
- Reactive sputtering equipment for industrial coating
- Reactive sputtering equipment for color TFT
Specifications
| Model | A2KH-25 | A2KH-50 | A2K-20K | A2K-40K | |
| Control power input | Input | AC90 to 110V | AC100 to 240V | ||
| Frequency | Single phase 50/60Hz | ||||
| Power | 100VA | 120VA | 400VA | ||
| Leak current | 1mA or less | ||||
| Input specification | operating voltage | -100 to -800V | |||
| operating current | 0 to 25A | 0 to 50A | 0 to 50A | 0 to 100A | |
| Input structure | Connector connection | Terminal block or connector connection | Connector connection | ||
| Output specification | Pulse range | 5μs/10μs ( Internal switch switching ) | 1 to 18μs (There is a frequency limitation) | ||
| Oscillating frequency | ・Pulse range 5μs： 2,5,10,15,20kHz ・Pulse range 10μs： 1,2.5,5,7.5,10kHz |
1 to 50KHz Variable in 1KHz increments |
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| Inversion pulse voltage | 10 to 20％ of the DC power generator output voltages. ( It depends on a load impedance ) | ||||
| Withstand voltage | continuous operation | -1500Vdc | |||
| Parallel operation | Nothing | Up to 6units can be controlled *5 | |||
| Cooling method | Forced air-cooling | ||||
| Dimension（W×D×H) | 238×450×149mm | 430×450×149mm | 483×630×177mm | ||
| Weight | 16kg | 27kg | 30kg | 45kg | |
| Applicable standard | RoHs | ||||
Ambient operating temperature 5℃ to 40℃ (no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
*5： A2K-20K and A2K-40K cannot be used together.