The DPG-5P/10P are 5kW/10kW pulsed dc power generators for reactive sputtering.
This power generator change the minus output voltage in to plus voltage, and discharge the
storage electron voltage of target surface. By this, yield and throughput improvement is realized
Features
- High throughput
- Makes high power input possible by reducing abnormal discharge
- Reduces substrate damage Capable of reducing substrate damage caused by arcs
- Variable inversion pulse frequency Possible range: 10kHz to 250kHz
- Capable of large capacities through master/slave connections Up to six units can operate in parallel(The same model is
available) - Corresponding to DC output It cancels a pulse function and can output DC
Applications
- Reactive sputtering equipment for FPD
- Reactive sputtering equipment for industrial coating
- Reactive sputtering equipment for color TFT
Specifications
