As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
Features
- Improvement in output regulation (Operates in 1％ to 100％ of rated)
- Wide range of output without tap changing
- Two types of arc detection function are equipped
- Countermeasure for extraneous noise by isolation (option)
- Selectable from three types of operation mode (power / current / voltage)
- Floating output up to +100V
Applications
- For Al, Ni and other metal sputtering processes
Specifications
| Model | DCS0052B | |
| Maximum output power | 500W | |
| Output range | Power | 5W～500W |
| Voltage | 80V～800V | |
| Current | 0.0012A～1.25A | |
| External dimensions (WDH) mm | 240 x 450 x 99 | |
| Weight | 9kg | |