As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
- Improvement in output regulation (Operates in 1％ to 100％ of rated)
- Wide range of output without tap changing
- Two types of arc detection function are equipped
- Countermeasure for extraneous noise by isolation (option)
- Selectable from three types of operation mode (power / current / voltage)
- Floating output up to +100V
- For Al, Ni and other metal sputtering processes
|Maximum output power||500W|
|External dimensions (WDH) mm||240 x 450 x 99|