As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.


  • Improvement in output regulation (Operates in 1% to 100% of rated)
  • Wide range of output without tap changing
  • Two types of arc detection function are equipped
  • Countermeasure for extraneous noise by isolation (option)
  • Selectable from three types of operation mode (power / current / voltage)
  • Floating output up to +100V


  • For Al, Ni and other metal sputtering processes


Model DCS0052B
Maximum output power 500W
Output range Power 5W~500W
Voltage 80V~800V
Current 0.0012A~1.25A
External dimensions (WDH) mm 240 x 450 x 99
Weight 9kg