The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
- Leight-weight/ Space-saving
Light-weight and space-saving design with excellent installation flexibility.
- Selectable output voltage range
We feature a lineup with 800V specifications in addition 1000V specification.
- Extensive arc handling
Extensive arc control methods familiar with plasma.
- Requires no cooling water
Forced air cooling, require cooling water.
- Can be equipped with a high-speed arc interruption circuit
Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
- Can be equipped with a flexible parallel operation function
DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)
- Flat panel display sputtering
- Semiconductor sputtering
- Touch panel sputtering
- Industrial coating sputtering
|Input specification||Rated input voltage||3-Phase 187 to 229VAC||3-Phase AC342 to 440V||3-Phase 187 to 229VAC||3-Phase AC342 to 440V|
|Input capacity||13.5kVA or less||25kVA or less|
|Output specification||Maximum rated power||10kW||20kW|
|Abnormal discharge control||Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected|
|Control||Control method||Constant power control (P control)/constant current control (I control)/constant voltage control (V control)|
|Control precision||Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger.
Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
|Control warranty scope||Constant power control, 10 to 100％ of rated power value|
|Extenal interface||analog/digital,RS-232C or 485|
|Parallel operation||Up to 12units can be controlled by master/slave communication|
|Cooling method||Forced air-cooling|
|Dimension W×D×H||483×630×133mm (excluding protrusions)|
|Applicable standard||CE/ SEMI F47/ RoHS|