MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator (DPG series). It contributes to improved productivity and throughput at low cost.


  • Wide frequency range
    Can be operated from 10k ~ 100kHz ※1
  • Enables the larger capacity by a master/slave connection
    Parallel operation of maximum six MFU-20K is possible
  • DC output is possible
    It is possible to apply an output of input DC power generator to a cathode directly ※2


  • Reactive sputtering equipment for FPD
  • Reactive sputtering equipment for industrial coating
  • Reactive sputtering equipment for color TFT
  • All sputtering equipment


Model MFU-20K
Control power input Rated input voltage AC100V/AC240V
Input voltage fluctuation range AC90 to 264V
Phase, frequency 1 phase 50/60Hz
Input capacity 400VA
Input Specification Operatig voltage 0 to -1000V※1
Non load voltage -1200V
Operatig current 50A
Output Specification Maximum rated voltage 1000V(RMS)※1
Non load voltage DC-1200V
Maximum Rated current 50A
Oscillating frequency 10k to 100kHz※2
Duty cycle 10 to 90%※3
Cooling method Forced air-cooling
Dimension(W×D×H) 483mm×630mm×177mm(excluding protrusions)
Weight 37kg
Applicable standard CE/SEMI F47/RoHS

Ambient operating temperature 5℃ ~ 40℃(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.