MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator (DPG series). It contributes to improved productivity and throughput at low cost.
- Wide frequency range
Can be operated from 10k ～ 100kHz ※1
- Enables the larger capacity by a master/slave connection
Parallel operation of maximum six MFU-20K is possible
- DC output is possible
It is possible to apply an output of input DC power generator to a cathode directly ※2
- Reactive sputtering equipment for FPD
- Reactive sputtering equipment for industrial coating
- Reactive sputtering equipment for color TFT
- All sputtering equipment
|Control power input||Rated input voltage||AC100V/AC240V|
|Input voltage fluctuation range||AC90 to 264V|
|Phase, frequency||1 phase 50/60Hz|
|Input Specification||Operatig voltage||0 to -1000V※1|
|Non load voltage||-1200V|
|Output Specification||Maximum rated voltage||1000V（RMS）※1|
|Non load voltage||DC-1200V|
|Maximum Rated current||50A|
|Oscillating frequency||10k to 100kHz※2|
|Duty cycle||10 to 90％※3|
|Cooling method||Forced air-cooling|
|Applicable standard||CE/SEMI F47/RoHS|
Ambient operating temperature 5℃ ～ 40℃（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.