RF power supply for plasma process with 13.56MHz, 0.5kW/1/kW/3kW/5kW output. Compact and lightweight by implementing a high efficiency RF amplifier. RF power supply has a built-in auto matching controller function, power control of the RF power supply and matching system control can be performed with the main unit alone.
Features
- Uses a high efficiency amplifier
Energy savings through a construction with an RF circuit featuring good power conversion efficiency. - High speed auto matching
Implements high speed auto matching with a high speed algorithm. - RF power generator internally equipped with an auto matching function
Matching system control is possible with the power generator unit itself. Also capable of manual RF power generator and matching box operations with the internal controller. - Supports flexible control configurations
Capable of external analog and serial communication control. - High reliability
Our accumulated knowledge as an equipment manufacturer has been reflected in the design.
Applications
- Sputtering and CVD
- Plasma etching
- RF ion source
- Neutralizer
Specifications
[Power generator]
| Model | RFS-1305N | RFS-1310N | RFS-1330N | RFS-1350N | |
| Input Spec | Input rated voltage | AC200 to 220V | |||
| Input voltage fluctuation range | AC180～242V | ||||
| Phase, frequency | 1phase 50/60Hz | 3phase 50/60Hz | |||
| Input connector | Bayonet netlock round connector DCA3102E16-10P-D |
Bayonet netlock round connector DCA3102E22-22P-D |
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| Input capacity | 1.2 kVA or less | 1.8 kVA or less | 5 kVA以 or less | 8 kVA or less | |
| Input current | 10A or less | 25A or less | 30A or less | ||
| Leak current | 5mA or less | ||||
| Output Spec | Oscillating frequency | 13.56MHz | |||
| Rated traveling-wave power | 500W（50Ω load） | 1000W（50Ω load） | 3000W（50Ω load） | 5000W（50Ω load） | |
| Maximum reflected wave power | 100W | 500W | |||
| Output impedance | 50Ω | ||||
| Harmonic distortion ratio | -35dB or less (Rated output, Continuous mode) | ||||
| Output connector | N type | HN type | DIN 7/16 | ||
| Cont | Control method | Power control mode | |||
| Control precision | Rated output ±2％ or less（Rated power 10～100％） | ||||
| Cooling method | Air-cooling | Water-cooling | |||
| No cooling water required | Flow rate 4L/min | Flow rate 6L/min | |||
| Control guarantee range | Rated power 10 to 100％ | ||||
| Demensions W x D x H | 240mm x 495mm x 150mm （excepting projection portion) |
480mm × 500mm × 150mm （excepting projection portion) |
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| Weight | 11kg | 23kg | |||
[Matching box]
| Model | MBX-1305N | MBX-1310N | MBX-1330N | MBX-1350N | |
| RF input | Input frequency | 13.56MHz | |||
| Rated power | 10～500W | 10～1000W | 30～3000W | 50～5000W | |
| Input connector | N type | HN type | DIN 7/16 type | ||
| RF output | Allowable output voltage | 2.5kVpp or less / 2.5kVdc or less | 5.0kVpp or less / 2.5kVdc or less | 10kVpp or less / 2.5kVdc or less | |
| Allowable output current | 30A or less | 80A or less | 120A or less | ||
| Load impedance | Real part： 0.5Ω ≦ R ≦ 10.0Ω （Only the range of regulation voltage and current） |
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| Residual reflected wave power | Big either input travelling wave power 0.3％ or less or 10W or less | Big either input travelling wave power 0.3％ or less or 30W or less | Big either input travelling wave power 0.3％ or less or 50W or less | ||
| Cooling system | Air-cooling | Air-cooling + Water-cooling （Flow rate 2L/min） | |||
| Demensions W x D x H | 375mm x 250mm x 120mm（excepting projection portion） | 375mm x 250mm x 170mm （excepting projection portion） |
450mm x 500mm x 248mm （excepting projection portion） |
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| Weight | Approx. 8kg | Approx. 10kg | Approx. 21kg | ||
* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas