"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)


  • Excellent in Cost Performance
    Suitable for RGA application
  • Communication interface
    Ethernet compatible
  • Integrated Display
    No need for PC
  • Simple Operation
    "One Click" function
  • Bake Out
    Max 120℃ (248℉) high temperature bake (250℃ (482℉) when sensors are removed)
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance help function
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard
    Conforms with CE


  • Residual gas analysis for organic electro luminescence
  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development


Resolution M/△M=1M(10% P.H.)

Model BGM2-101 BGM2-201 BGM2-102 BGM2-202
Mass filter type Quadrupole
Mass range 1~100 amu 1~200 amu 1~100 amu 1~200 amu
Detector type Faraday cup EM tube
Faraday cup
Sensitivity 10-7A/Pa 4A/Pa
Minimum detectable partial pressure 10-8Pa 10-12Pa
Maximum operating pressure 1x10-2Pa
Total pressure function Capable/10-2 ~ 10-5Pa
One Click function Capable /He/H2O/N2/O2/Any gas
One Click leak test function Capable
Power input DC24V±10% 50W
Maximum sensor operating temperature 120℃ (248℉)
Maximum bakeout temperature (electronics removed) 250℃ (482℉)
Operating temperature range 10 to 40℃ (50 to 104℉)
Software Qulee QCS Ver.4.0 later (Windows 7/8/10)
Applicable standard CE