A pressure sensor unit that is adopting a semiconductor type thin-film element. By this can measure near to the atmospheric pressure (Gauge pressure : -100kPa~10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.

Features

  • Suitable for atmosphere pressure check:
    Pressure standard is corresponding with gauge pressure and a high accuracy measurement is capable
  • Corresponding to the continuous use of high vacuum pressure process:
    Semiconductor type thin-film element (SUS316L) is adopted to be compatible for a high
  • Measurement output signal:
    Pressure is set to DC 0 to 5V Log out signal as a standard
  • Rotate Generator:
    Compatible in wide for DC12 to 24V
  • Quick coupling standard:
    Adopting a NW16 port

Applications

  • To confirm the atmospheric pressure of PV, FPD, SEMICONDUCTOR system which contain high vacuum components.
  • To confirm the atmospheric pressure of Industrial Vacuum Equipment like furnace systems which contain high vacuum components.
  • To the vacuum system that require the high accuracy measurement of -100kPa~0kPa Gauge pressure (Absolute pressure:10+4~10+5Pa )

Specifications

SAU-Spec.jpg