A pressure sensor unit that is adopting a semiconductor type thin-film element. By this can measure near to the atmospheric pressure (Gauge pressure : -100kPa～10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.
- Suitable for atmosphere pressure check：
Pressure standard is corresponding with gauge pressure and a high accuracy measurement is capable
- Corresponding to the continuous use of high vacuum pressure process：
Semiconductor type thin-film element (SUS316L) is adopted to be compatible for a high
- Measurement output signal：
Pressure is set to DC 0 to 5V Log out signal as a standard
- Rotate Generator：
Compatible in wide for DC12 to 24V
- Quick coupling standard：
Adopting a NW16 port
- To confirm the atmospheric pressure of PV, FPD, SEMICONDUCTOR system which contain high vacuum components.
- To confirm the atmospheric pressure of Industrial Vacuum Equipment like furnace systems which contain high vacuum components.
- To the vacuum system that require the high accuracy measurement of -100kPa～0kPa Gauge pressure (Absolute pressure：10+4～10+5Pa )