G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected. Ease of maintenance reduces the cost of ownership.
Features
- Transducer specification
When the pressure display is not required, the following advantages can be achieved:
? Vacuum gauge cost is reduced because the display has been eliminated
? Smaller size frees-up control panel space
? Wiring is reduced - Maintenance is greatly simplyfied
- Filament is eliminated: No damage from exposure to atmospheric pressure
- Control output sign: 2 setpoint output
- Output signal: Pressure reading is a 0 to 10V Log output (non-linear output)
- Power supply voltage: Operated by DC24V
Applications
- Process control in the pressure range of precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing
- Process control in low vacuum range for industrial equipment such as furnaces
- Process control in the pressure range for vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment
Specifications
| Type | Sensor unit | ||
| Model | SC1 | ||
| Compatible sensor head | C-21、23、24、25 | ||
| Measurement pressure range | 1.0×10-5 to 1.0 Pa | ||
| 7.5×10-8 to 7.5×10-3 Torr | |||
| 1.0×10-7 to 1.0×10-2 mbar | |||
| Accuracy | ＋100%,－50%（1.0×10-4 to 1.0×10-1 Pa） | ||
| ＋100%,－50%（7.5×10-7 to 7.5×10-4 Torr） | |||
| ＋100%,－50%（1.0×10-6 to 1.0×10-3 mbar） | |||
| Measurement value output | Nonlinear output: 0 to 10VDC | ||
| Pressure setting adjustment monitor | Nonlinear output: 0 to 10VDC | ||
| Control input signal | HV ON/OFF | ||
| Control output signal | Open collector output, negative logic Confirmation of electrical dischargel / Setpoint actuating signal 1/2 | ||
| Control output signal | Open collector output, negative logic Confirmation of electrical dischargel / Setpoint actuating signal 1/2 | ||
| LED display | POWER, HV, PROTECT, SETPOINT1/2 | ||
| Operating temperature range | 10 to 40℃（50 to 104°F） | ||
| Operating humidity range | 15 to 80%（not condensing） | ||
| Power supply voltage | DC24V±2V, 150mA | ||
| Input/Output connector | D-sub-15pin（M2.6 screw） | ||
| Weight | 430g（Excluding sensor head） | ||
| Standard accessories | Input/Output connector 1pc | ||
| Quick manual 1pc |
* IO and analog GND are not isolated from the power GND.