G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected. Ease of maintenance reduces the cost of ownership.

Features

  • Transducer specification
    When the pressure display is not required, the following advantages can be achieved:
    ? Vacuum gauge cost is reduced because the display has been eliminated
    ? Smaller size frees-up control panel space
    ? Wiring is reduced
  • Maintenance is greatly simplyfied
  • Filament is eliminated: No damage from exposure to atmospheric pressure
  • Control output sign: 2 setpoint output
  • Output signal: Pressure reading is a 0 to 10V Log output (non-linear output)
  • Power supply voltage: Operated by DC24V

Applications

  • Process control in the pressure range of precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing
  • Process control in low vacuum range for industrial equipment such as furnaces
  • Process control in the pressure range for vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment

Specifications

Type Sensor unit
Model SC1
Compatible sensor head C-21、23、24、25
Measurement pressure range 1.0×10-5 to 1.0 Pa
7.5×10-8 to 7.5×10-3 Torr
1.0×10-7 to 1.0×10-2 mbar
Accuracy +100%,-50%(1.0×10-4 to 1.0×10-1 Pa)
+100%,-50%(7.5×10-7 to 7.5×10-4 Torr)
+100%,-50%(1.0×10-6 to 1.0×10-3 mbar)
Measurement value output Nonlinear output: 0 to 10VDC
Pressure setting adjustment monitor Nonlinear output: 0 to 10VDC
Control input signal HV ON/OFF
Control output signal Open collector output, negative logic Confirmation of electrical dischargel / Setpoint actuating signal 1/2
Control output signal Open collector output, negative logic Confirmation of electrical dischargel / Setpoint actuating signal 1/2
LED display POWER, HV, PROTECT, SETPOINT1/2
Operating temperature range 10 to 40℃(50 to 104°F)
Operating humidity range 15 to 80%(not condensing)
Power supply voltage DC24V±2V, 150mA
Input/Output connector D-sub-15pin(M2.6 screw)
Weight 430g(Excluding sensor head)
Standard accessories Input/Output connector 1pc
Quick manual 1pc

* IO and analog GND are not isolated from the power GND.