The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).
Features
- Transducer spec
If you don't need a pressure display device:
・You can lower the costs associated with a vacuum gauge
・You can save space by minimizing the control panel - Replacing sensort heads is greatly simplyfied
- Corrosion-resistant platinum is used for the filament material
- You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
- Able to output 2 set points
- SP1: Pressure reading is a 0 to 5V output (non-linear)
- Able to operate at 24VDC power input
Applications
- Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
- Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
- Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.
Specifications
| Type | Sensor unit |
| Model | SP1 |
| Compatible sensor head | WP-01, WP-02, WP-03, WP-16 |
| Accuracy
|
±15 %（51 Pa ～760 Pa） |
| ±30 %（10 Pa ～1000 Pa） | |
| ±50 %（0.4 Pa ～3000 Pa） | |
| Operating temperature range | 10 ~ 40℃ |
| Measurement value output | Nonlinear output: 0 to 5VDC (Max. 10V) |
| Setpoint 1/2 Pressure setting adjustment monitor | Nonlinear output: 0 to 5VDC (Max. 10V) |
| Control output signal | Open collector output, Negative logic |
| ERROR signal | |
| Setpoint 1/2 | |
| LED display | Power, error, set point 1, set point 2 |
| Power supply voltage | DC24V±2V, 90mA（Max.） |
| Input/Output connector | D-sub-15P（M2.6 screw） |
| Weight | 190g /0.41lb (Excluding sensor head) |
| Standard accessories | Input/Output connector 1pc |
| Quick manual 1pc |
IO and analog GND are not isolated from the power GND.