This is a wide range pirani vaccum gauge which measures from atmospheric pressure to 5 x 10-2 Pa. In addition, this gauge removes control and display panels from traditional controllers, keeping the minimum necessary functions only, thus saving cost and space.
Features
- Measures from atmospheric pressure to 5 x 10-2 Pa.
- Combined sensor and controller, thus reducing cables, saving space and energy.
- Operates with DC 24V input
- Pressure is 0 to 10V Log output
- LED Error verification for better visibility
- Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.
- Sensor unit can be replaced easily.
- 2 set points output (SW1-1)
- RS232C/RS485 communication (only SW1-2)
- Conforms with CE
Applications
- Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.
- Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.
- Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
Specifications
| Model | SW1-1 | SW1-2 |
| Connectable sensor head | 1 pc | |
| Compatible sensor head | SWP-16（NW16）, SWP-25（NW25), SWP-R1/8（R1/8）, SWP-P18（φ18）, SWP-P15（φ15）, SWP-CF16（ICF034）, SWP-1S（ASME BPE sanitary 1"） | |
| Measurable pressure range | 5.0×10-2 ~ 1.0×10+5 Pa（Pa（表示範囲：1.0×10-2 ~ 1.2×10+5Pa） | |
| Accuracy* | 1×10-1 Pa ~ 1×10+4 Pa ： ±10% | |
| 5.0×10-2 ~ 1.0×10-1 Pa, 1×10+4 Pa ~ 1×10+5 Pa : ±20% | ||
| Repeatability | 1×10-1 Pa ~ 1×10+4 Pa : ±2% | |
| Sampling time | 50ms 5回の移動平均処理 | |
| Value output | Output voltage DC 0 to 10V | |
| Pressure indication (Log) 1.7V to 8.0V 1V/decade | ||
| (Update time) 50ms | ||
| Control input signal | Open collector input, Negative logic | - |
| ADJ Adjustment (ZERO point, atmosphere adjust) | - | |
| Control output signal | Open collector output, negative logic [rating: 30VMAX, 50mAMAX, 70mW] | - |
| Error signal | - | |
| Set point 1, 2 | - | |
| Monitor for setpoint | Set point 1, 2: 0 to 10V Log output | - |
| Serial communication type | - | RS232C/RS485 |
| LED display | POWER/ERROR: Power error LED | |
| SET-1: Set point 1LED | - | |
| SET-2: Set point 2LED | - | |
| Materal of filament | Pt | |
| Operating temperature range | 10 ~ 40℃ | |
| Operating humidity range | 15 ~ 80% (Not condensing) | |
| IP rating | IP30 (Sensor unit) | |
| Fixing position | Free | |
| Power supply voltage | DC18V ~ 30V, 2W (4.8W w/power input) | |
| Input/output connector | D-sub 15-pin (M2.6mm screw) - side sensor unit | |
| Weight | 150g (with SWP-16) | |
| Dimension (Power supply) W×D×H | 70mm×46mm×28mm | |
| Standard accessories | Quick manual | |
| Option | Input/output conector (D-sub 15-socket (M2.6mm screw)), Inspection result data sheet, General calibration test report, JCSS caribration certificate | |
| Applicable standard | CE | |