CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Excellent pumping performance for a 4-inch cryopump
- High pumping speed improves the pumping efficiency and productivity.
- Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
- Up to four units can be run by one compressor.
- Customized design is available to fit your needs.
Specifications
| Model | U4H | U6H | U8H / U8H-U | U8HL | U10H | U12H | U12HL | ||
| Pumping speeds(20degrees) | Nitrogen | L/s | 450 | 750 | 1,700 | 1,500 | 2,400 | 4,000 | 4,000 |
| Hydrogen | 500 | 1,100 | 2,700 | 2,200 | 3,600 | 6,000 | 6,800 | ||
| Argon | 370 | 620 | 1,400 | 1,200 | 2,000 | 3,300 | 3,300 | ||
| Water | 1,100 | 2100 | 4,000 | 4,000 | 6,900 | 9,500 | 9,500 | ||
| Ultimate pressure | Pa | 10-7 | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s | 1.3×103 | 1.1×103(7.9) | 1.2×103(8.9) | 1.2×103(8.9) | 8.0×102(6.0) | 2.0×103(15) | 2.0×103(15) |
| Pumping capacity | Argon | Pa・L | 1.0×107 | 1.1×102(0.8) | 2.4×102(1.8) | 1.6×102(1.2) | 1.5×102(1.1) | 4.1×102(3.1) | 4.1×102(3.1) |
| Hydrogen | 1.5×105 | 5.6×107(4.2×105) | 1.0×108(7.6×105) | 1.6×108(1.2×106) | 1.0×108(7.8×105) | 2.1×108(1.6×106) | 3.1×108(2.3×106) | ||
| Cooldown time | min(50/60Hz) | 45/50 | 3.1×105(2.3×103) | 1.0×106(7.6×103) | 1.2×106(9.0×103) | 6.7×105(5.0×103) | 9.8×105(7.4×103) | 9.8×105(7.4×103) | |
| Weight of cryopump | Kg | 14.5 | 19 | 20.8 | 20 | 29 | 40 | 40 | |
| Model | U16 | U16P | U20P | U20H | U22H | U22P | U22WB | U30H | ||
| Pumping speeds(20degrees) | Nitrogen | L/s | 5,000 | 5,000 | 10,000 | 10,000 | 17,000 | 11,500 | 13,000 | 28,000 |
| Hydrogen | 10,000 | 10,000 | 18,000 | 18,000 | 25,000 | 14,000 | 16,500 | 43,000 | ||
| Argon | 4,200 | 4,200 | 8,400 | 8,400 | 14,000 | 9,700 | 11,000 | 23,000 | ||
| Water | 16,000 | 16,000 | 29,000 | 29,000 | 39,000 | 39,000 | 39,000 | 70,000 | ||
| Ultimate pressure | Pa | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s | 1.4×103(11.0) | 1.6×103(12) | 1.1×103(8.7) | 1.7×103(12.8) | 4.1×103(31) | 1.7×103(12.8) | 3.5×103(26) | 2.7×103(20) |
| Pumping capacity | Argon | Pa・L | 4.1×102(3.1) | 4.5×102(3.4) | 5.0×102(3.7) | 5.0×102(3.7) | 1.3×103(9.6) | 5.0×102(3.7) | 1.3×103(9.6) | 7.4×102(5.6) |
| Hydrogen | 4.3×108(3.3×106) | 4.3×108(3.3×106) | 5.8×108(4.4×106) | 5.8×108(4.4×106) | 8.1×108(6.1×106) | 5.8×108(4.4×106) | 8.1×108(6.1×106) | 7.8×108(5.9×106) | ||
| Cooldown time | min(50/60Hz) | 2.4×106(1.8×104) | 2.4×106(1.8×104) | 4.6×106(3.4×104) | 4.6×106(3.4×104) | 8.5×106(6.4×104) | 6.0×106(4.5×104) | 8.5×106(6.4×104) | 1.5×107(1.1×105) | |
| Weight of cryopump | Kg | 61 | 61 | 69 | 72 | 125 | 115 | 125 | 175 | |
*Maintenance interval: every 16,000 hours