Scroll Type Dry Vacuum Pump
Features
- Compact size with large displacement.
- The highest level of ultimate pressure for dry vacuum pumps.
- Safety design with built-in automatic reset type thermal protector.
- Suppresses moisture condensation by air flush.
Applications
- Analytical equipment.
- Gas recovery system.
- Coating equipment.
- Back pump for TMP.
- Helium leak detector.
- Manufacturing process for semiconductor.
Specification
| Model | DIS-90 | DIS-251 | DIS-501 | |||||
| unit | 50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz | ||
| Nominal Pumping Speed | L/min | 90 | 108 | 250 | 300 | 500 | 600 | |
| Ultimate Pressure | Pa | 5.0 | 1.6 | 1.0 | ||||
| Motor | Single Phase | Single phase, 100/115/200/230V, 150W, 4P Capacitor start/run | Single phase, 100/115/200/230V, 400W, 4P Capacitor start/run | Single phase, 100/115/200/230V, 600W, 4P Capacitor start/run | ||||
| Three Phase | - | - | - | |||||
| Full Load Current | Single Phase | A | 2.6/1.3/1.6 (100/200/230V) |
2.1/2.2/1.1/1.1 (100/115/200/230V) |
4.8/2.6/2.4 (100/115/200/230V) |
4.8/4.3/2.8/2.4 (100/115/200/230V) |
8.5/4.3/3.9 (100/200/230V) |
10.0/8.6/4.8/4.0 (100/115/200/230V |
| Three Phase | - | - | 1.6/0.9/0.9/1.0 (200/380/400/415V) |
1.9/1.9/1.8/1.0 (200/208/230/460V) |
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| Weight | Single Phase | kg | ||||||
| Three Phase | ||||||||
| Inlet,outlet pipe diameter | ||||||||
| Ambient temperature | ℃ | |||||||
| Water vapor handling | g/day | |||||||
| Overall dimensions | Single Phase | mm | ||||||
| Three Phase | ||||||||