Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.
Features
- Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
- Useful for load/unload lock chambers which require high throughput.
- A universal induction motor is used. An explosion proof motor is avaialble as an option.
- For motor power. Specify voltage required when ordering. Either 200 VAC Class or Multiple voltage motors are available.
Applications
- Clean gas vacuum pumping such as air, inert gas.
- Load/unload lock chambers of various types of deposition equipment.
- General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.
Specifications
|
Model
|
GR60A | GR90A | GR180A | ||||
| Hz | 50Hz | 60Hz | 50Hz | 60Hz | 50Hz | 60Hz | |
| Maximum pumping speed | m3/h | 62 | 80 | 112 | 126 | 183 | 237 |
| L/min | 1030 | 1333 | 1860 | 2100 | 3100 | 3950 | |
| cfm | 36.4 | 47.1 | 65.7 | 74.2 | 109.5 | 139.5 | |
| Ultimate pressure | 5.0Pa *1 | ||||||
| 3.7 x 10-2Torr *1 | |||||||
| 5.0 x 10-2mbar *1 | |||||||
| Maximum inlet pressure | Atmospheric pressure | ||||||
| Maximum exhaust pressure | 1.0Pa to Atmospheric pressure | ||||||
| 7.5 x 10-3Pa to Atmospheric pressure | |||||||
| 1.0 x 10-2mbar to Atmospheric pressure | |||||||
| Inlet port | VG50 or ISO63F | Equivalent to VG80 or ISO80F | |||||
| Outlet port | NW40 | ||||||
| Surface treatment | Standard option | ||||||
| Weight | 128kg | 188kg | 268kg | ||||
| Cooling water | Supply pressure | 0.1 to 0.3MPa | |||||
| 14.5 to 43.5psi | |||||||
| In/Out difference pressure | >0.1MPa | ||||||
| >14.5psi | |||||||
| Temperature | 10 to 30oC *2 | ||||||
| 50 to 86℃ | |||||||
| Flow rate | >5.0L/m | ||||||
| N2 |
Primary side supply pressure
|
0.1 to 0.5MPa | |||||
| 14.5 to 72.5psi | |||||||
|
Secondary side regulated pressure *3 |
0.05 to 0.1 (at running) | ||||||
| 7.3 to 14.5psi | |||||||
|
Shaft
|
5SLM *4 | ||||||
*1 Ultimate pressure is the value when the nitrogen gas (shaft seal gas) is at 5.0SLM.
*2 Non condensing.
*3 Value indicated on pressure gauge is adjusted by a gas regulator.
*4 Flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.
■Specify a motor voltage from following table when ordering.
Either a 200 Volt class motor or a multiple volt motor
|
Model
|
GR60A | |||||||||||||||
| Selectable motor | 200V class motor | Multiple voltage motor | ||||||||||||||
| Frequency |
Hz
|
50
|
60
|
50 | 60 |
50
|
60 | |||||||||
| Voltage |
V
|
200
|
200
|
220
|
220
|
240
|
208
|
220
|
240
|
380
|
400
|
415
|
380
|
440
|
460
|
|
| Rated current | A | 9.2 | 8.8 | 8.1 | 8.1 | 8.1 | 8.5 | 8.1 | 7.4 | 4.8 | 4.8 | 4.7 | 4.6 | 4.3 | 4.1 | |
| Wiring | Delta wiring | Delta wiring | Star wiring | |||||||||||||
| Model | GR90A | |||||||||||||||
| Selectable motor | 200V class motor | Multiple voltage motor | ||||||||||||||
| Frequency |
Hz
|
50
|
60
|
50 | 60 |
50
|
60 | |||||||||
| Voltage |
V
|
200
|
200
|
220
|
220
|
240
|
208
|
220
|
240
|
380
|
400
|
415
|
380
|
440
|
460
|
|
| Rated current | A | 14.2 | 14.1 | 12.8 | 12.8 | 12.7 | 13.4 | 12.8 | 11.8 | 7.5 | 7.4 | 7.3 | 7.3 | 7 | 6.3 | |
| Wiring | Delta wiring | Delta wiring | Star wiring | |||||||||||||
|
Model
|
GR180A | |||||||||||||
| Selectable motor | Common multiple volt motor available for this pump | |||||||||||||
| Frequency |
Hz
|
50
|
60 |
50
|
60 | |||||||||
| Voltage |
V
|
200
|
200
|
240
|
200
|
208
|
220
|
240
|
380
|
400
|
415
|
380
|
440
|
460
|
| Rated current | A | 26.1 | 25.1 | 25.7 | 26.3 | 24.9 | 23.9 | 22.5 | 14.5 | 14.7 | 14.9 | 13.9 | 13.3 | 12.5 |
| Wiring | Delta wiring | Star wiring | ||||||||||||
■Silencer (Option)
| Model | Material | Surface treatment | Weight (kg) | Flange Connection |
| RS-01 | SUS304 | GBB treatment | 4.1 | NW40 |
| RS-02 | SUS304 | GBB treatment | 8.3 | NW40 |
■Acceptable Table
| Kit type | Agreement | Clamp | Outer ring | Connection Flange | Stay |
| RS-01 kitA | GR60,GR90 | 1 | 1 | - | - |
| RS-01 kitC | GR180A | 2 | 2 | 1 | 1 |