ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
Features
- The LR series pump is designed for either load lock or PVD processes.The HR series pump is designed for CVD and etch processes.
- The UR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
- Excellent helium pumping capability : Canned motor for safety and ease of maintenance
- Power failure protection : Pump withstands power interruptions of up to 1000ms duration.
- Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses.
- Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
- CE marking is available upon request.
Applications
- Pump is designed for CVD or dry etching applications / designed for PVD, evaporation, or heat treatment processes
/designed to handle process gasses that generate powder by products such as Si crystal growing furnaces
Specifications
| Model | LR/HR 60 |
LR/HR 90 |
LR 180 |
LR 421 |
LR 421-T |
UR 421-T |
LR/HR 300 |
LR/HR 600 |
UR 600 |
LR/HR 1200 |
UR 1200 |
||
| Pump | DRP | LR/HR 60 |
LR/HR 90 |
LR 180 |
LR 421 |
LR 421-T |
UR 421-T |
LR/HR 60 |
LR/HR 90 |
UR 90 |
LR/HR 90 |
UR 90 |
|
| MBP | － | PRC-003A | PRC-006A | PRC-012A | |||||||||
| Max. pumping speed | m3/h | 50Hz | 62 | 112 | 183 | 440 | 440 | 410 | 359 | 653 | 653 | 1012 | 1012 |
| 60Hz | 80 | 126 | 237 | 365 | 701 | 1051 | |||||||
| L/min | 50Hz | 1030 | 1860 | 3100 | 7333 | 7333 | 6833 | 5980 | 10900 | 10883 | 16900 | 16867 | |
| 60Hz | 1333 | 2100 | 3950 | 6080 | 11700 | 17500 | |||||||
| Ultimate pressure | Pa | 5.0 | 0.67 | ||||||||||
| Max. inlet pressure | Atmospheric pressure * | ||||||||||||
| Max. exhaust pressure | 1.0 to Atmospheric pressure | ||||||||||||
| Inlet diameter (type CE) | VG50 (KF40) |
VG80(KF50) | VG100 | VG80(KF80) | VG100(KF100) | ||||||||
| Outlet diameter | KF40 | VG50 | KF40 | ||||||||||
| DRP: Rotor blade surface treatment | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ||
| MBP: Rotor blade surface treatment | - | - | - | - | - | - | ○ * | ○ * | ○ | ○ * | ○ | ||
| Weight | kg | 180 | 245 | 335 | 415 | 251 | 371 | 403 | |||||
| Power | Three phase | VAC (Hz) |
200（50/60), 220(60) | 180～240/380～440（50/60） | 200（50/60), 220(60) | ||||||||
| Current | At ultimate pressure | A | 6.9/7.1 | 11.2 | 18.9 | 20.8 | 23 | 7.0/7.8 | 12.3/12.9 | 16.4 | 13.7/15.4 | 18.9 | |
| At max. load | A | 7.0/7.3 | 11.8 | 20.6 | 48.5 | 52.5 | 9.6/8.1 | 19.0/13.8 | 17.3 | 24.2/18.9 | 22.4 | ||
| Cooling water Supply pressure | MPa | 0.1 to 0.3 | 0.2 to 0.5 | 0.1 to 0.3 | |||||||||
| Cooling water In/Out differrence pressure |
MPa | ＞0.1 | ＞0.2 | ＞0.1 | |||||||||
| Cooling water Flow rate |
L/min | ＞5.0 | ＞4.0 | ＞5.0 | ＞5.0 | ||||||||
| N2 gas | Supply pressure | MPa | 0.1 ～ 0.5 | ||||||||||
| Regu-lated pressure | MPa | 0.05 ～ 0.1 | |||||||||||
| N2 purge | Shaft purge | SLM | 5 | ||||||||||
| Gas ballast | SLM | 0～45 | None *1 | 0～45 | 0～195 | 0～45 | |||||||
*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
*〇=with ×=with out
*MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
*Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotion.
■Silencer (Option)
| Model | Material | Surface treatment | Weight (kg) | Flange Connection |
| RS-01 | SUS304 | GBB treatment | 4.1 | NW40 |
| RS-02 | SUS304 | GBB treatment | 8.3 | NW40 |
| RS-03 | SUS304 | Polished plate | 12.5 | NW50 |
■Acceptable Table
| Kit type | Agreement | Clamp | Outer ring | Connection Flange | Stay |
| RS-01 kitA | LR60,LR90,LR300 | 1 | 1 | - | - |
| RS-01 kitB | LR600,LR1200 | 2 | 2 | 1 | 1 |
| RS-02 kitA | LR180（LR60,LR90,LR300） | 2 | 2 | 1 | 1 |
| RS-02 kitB | LR1800（LR600,LR1200） | 2 | 2 | 1 | 1 |
| RS-03 kitA | LR421(-T) | 1 | 1 | 1 | 1 |
| RS-03 kitB | LR3601(-T/TT/R/TR/TTR） | 3 | 3 | 1 | 1 |