High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.
Features
- High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
- ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C) - Built-in silencer achieves the noise level 61dB(A) or less.
- Low running-cost
No shaft sealing gas.
※Purge gas is available with L Type. - 4 Pumping speed120~1200m3/h Class ※With mecanical booster pump
Model is selectable with the optimum pumping speed according to the application.
Applications
C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.
L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc.
Specifications
| Model | （C：C Type） （L：L Type） |
LS120A | LS300A | LS600A | LS1200A | |||||
| C | L | C | L | C | L | C | L | |||
| Max. pumping speed | m3/h | 120 | 380 | 600 | 1000 | |||||
| Ultimate pressure | Pa | ≦0.6 | ≦0.1 | |||||||
| Power supply | 200V Class : 3Phase, 50/60Hz, AC200-240V or 400V Class : 3Phase, 50/60Hz, AC380-480V | |||||||||
| Power consumption ※1 | kW | 0.6 | 2.0 | 1.0 | 2.5 | 1.3 | 2.6 | 1.3 | 2.7 | |
| Cooling water flow rate | L/min | >2.0 | ＞4.0 | |||||||
| Purge gas flow rate ※2 | SLM | ー | 0～50 | ー | 0～50 | ー | 0～50 | ー | 0～50 | |
| Max. water vapor tolerance ※3 | kg/h | ー | 1.5 | ー | 1.5 | ー | 1.5 | ー | 1.5 | |
| Noise | dB(A) | 61 | 61 | 62 | 64 | |||||
| Inlet port | KF50(Horizontal)/VG50(Vertical) | ISO-F-50 | ISO-F-80 | ISO-F-100 | ||||||
| Outlet port | KF40 | |||||||||
| Weight | kg | 142 | 220 | 242 | 266 | |||||
| Applicable standard | CE, cTUVus | |||||||||
| Standard accessory | Instruction manual(CD-R), Power connector, Waterproof cable clamp, Remote connector, Guard for power connector | |||||||||
| Pump head option | Power supply : 200V Class or 400V Class, Material of seal : FFKM(L type only) | |||||||||
| External option | MBP inlet flange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve | |||||||||
※1： At ultimate pressure (reference only)
※2：Purge gas is not available with C Type.
※3： Max.water vapor tolerance is a value when purge gas is used.
※4：C type is not leakless.