Features
- Reach performance equivalent to dry and oil rotary pump.
- It can operate in all pressure zones from atmospheric pressure to reach.
- Strong against water vapor.
- No need for cooling water.
- Supports single phase / three phase power supply with one model.
- Long service life without sliding parts.
Applications
- Analytical equipment.
- Gas recovery system.
- Coating equipment.
- Back pump for TMP.
- Helium leak detector.
- Manufacturing process for semiconductor.
Specification
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※:F.A=Flush. Air
Corresponding certificate/Voltage
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●:Standard、○:Option、-:Not Applicable
Caution
1
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If the pump evacuates the powder or the product, it might be damaged.
Please use the inlet filter etc. |
2
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Do not evacuate gas which is hazardous to humans or explosive, flammable, or corrosive. If done, it can cause failure by gas, explosion or ignite.
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3
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It is a pump only in the room.
Please do not set it up in the place, that rain and water splash, and outdoors. |
Dimension drawing
Pumping Speed Curves