Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
Features
- Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
- Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
(compared with the ULVAC's conventional pumps) - High pumping speed attained the ultra-high vacuum
- Pumping down to ultra-high vacuum in a short period of time
- Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specifications
| Model | PST-030CU/AU | PST-050CU/AU | PST100CX/AX | PST-110AU | PST-200CXII /AXII | PST-400 CXII/AXII |
| Evacuation speed to 1 x 10-7 | N2: 0.03m3/s Ar: 0.013m3/s |
N2: 0.045m3/s Ar: 0.03m3/s |
N2: 0.10m3/s Ar: 0.08m3/s |
N2: 0.11m3/s Ar: - |
N2: 0.20m3/s Ar: 0.105m3/s (AXII) 0.02m3/s (CXII) |
N2: 0.36m3/s Ar: 0.19m3/s (AXII) 0.04m3/s (CXII) |
| Final pressure (Pa) | 10-9 | 10-9 | 10-9 | 10-9 | 10-10 | 10-10 |
| Operation pressure (Pa) *1 | <8.0×10-3 | <8.0×10-3 | <5.0×10-3 | <4.5×10-3 | <3.8×10-3 | <3.0×10-3 |
| Inner Volume | 6.7 X 10-4m3 | 1.37 X 10-3m3 | 3.3 X 10-3m3 | 6.5 X 10-3m3 | 11 X 10-3m3 | 14 X 10-3m3 |
| Number of pump elements | 1 set ※ anticommutative |
1 set ※ anticommutative |
1 set ※ anticommutative |
2 set ※Replaceable |
2 set ※Replaceable |
4 set ※Replaceable |
| Connection flange model | UFC070 | UFC114 | UFC152 | UFC152 | UFC203 | UFC203 |
| Applied voltage | DC+7.5kV | DC+7.5kV | DC+7.5kV | DC+7.5kV | DC+7.5kV | DC+7.5kV |
| Standard bake-out temperature | 250°C | 250°C | 250°C | 250°C | 250°C | 250°C |
| Weight (kg) | 9.5 | 12.8 | 37 | 36.5 | 65 | 124 |
| External dimensions W×D×H (mm) |
103×183×187 | 153×204×241 | 155×340×340 | 171x387x293 | 296x361x376 | 296x544x376 |
| Recommended Controller | GST-07L-B | GST-07L-B | GST-07L-B | GST-07L-B | GST-07L-B | GST-07L-B |
*1) During the time of use of the GST-07L-B Type Controller
PST Series Controller
The GST-07L-B is a sputter ion pump controller which features sophisticated functions and high-grade reliability. It is the product of ULVAC' s extensive technological reserves and long track record of proven performance in the ultra-high vacuum field.
Features
- Compact size and light weightMulti-function performance enabled by CPUControl of all sputter ion pumps (PST series) possible using one controller
- Communication functions provided as standard featuresRemote control and automated operations are made possible by the external communication control functions which have been provided as standard features.
- XHV supported Pump cell contamination can be reduced to the absolute minimum by the automatic start circuit and soft start functions. (-Patent No. 1340297, etc. pending)
- Improved safety functionsThe controller comes with a function which prevents the erroneous operation of its function switches and with interlock functions for protection.Fluorocarbon resin high-voltage cables with excellent resistance to the heat and cold and superb electrical characteristics are used.Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment (RoHS directive)-supportedCE marking-supported
Applications
- Accelerators
- Electron microscopes
- Analyzers
Specifications
| Attachable pump | Actor pump (all models in PST series) | |
| Operating pressure | 10-2 to 10-4Pa or lower | |
| Display ranges | Display method | Digital display (on 7-segment LEDs） |
| Display contents | ||
| a）Output current display | Automatic selection of 2 ranges: mA, μA (linear display) | |
| b）Output voltage display | 0.0 to 7.5 kV (H or L) (1-range linear display) | |
| c）Pressure display | Pa, mbr (1×10-8～1×10-2Pa) (1×10-10～1×10-4mbar) |
|
| Output release voltage | DC+7.5kV (2points, high and low, selectable using front panel switch; high/low voltage setting adjustable from approx.1.0 to 7.5kV using trimmer) |
|
| Output current | Less than DC31mA | |
| Input voltage/current | AC100～115V±10% ・ 50/60Hz～3.0A AC200～240V±10% ・ 50/60Hz～1.5A |
|
| MONITOR terminal output signal | Output of signals proportionate to 7-segment panel display,DC 0 to 10V full scale for each range, more than 100kΩ | |
| Pressure setting point | 2 points | |
| REMOTE/LOCAL | Selectable using from panel switch | |
| External control functions | Various input/output functions provided (REMOTE connector provided) (Remote, RS-232C communication control) | |
| Protection functions | Error display/various protection functions provided High voltage(HV) output shutdown ERR 0 to 5 light Timer setting for startup protection (adjustable from 1 to 255 minutes) Automatic reserving after power failure (HV hold switch operation) |
|
| Ambient operating conditions | Temperature | 0～40℃ |
| Humidity | Less than 85% (no dew) | |
| Accessories | Output cable (5m), input cable (3m) | |
| Weight | Main unit: approx. 4kg, cables: approx. 1.0kg (standard) | |
| Dimensions W x H x D | 240 x 99 x 370 mm {200 x 99 x 370 mm (Except rack mounting bracket)} | |