By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
Features
- These pumps use no oil in the pumping chamber resulting in stable performance even when evacuating water vapor or solvent vapors.
Specifications
| Model | PMB-040C | PMB-060C | |
| Actual pumping speed *1 | 50Hz | 3800m3/h (63300L/min) |
6200m3/h (103300L/min) |
| 60Hz | |||
| Maximum suction pressure | 50Hz | 8.0 x 102Pa | |
| 60Hz | |||
| Ultimate pressure *2 | 6.7 x 10-1Pa | ||
| Allowable drive pressure | 1.0 x 10-3Pa | ||
| Motor (number of poles) *3 | 15kW (4P) | 18.5kW (4P) | |
| Oil *4 | ULVOIL R-7 | ||
| Oil capacity | 8.0L | ||
| Cooling water | Cooling method | Water cooling | |
| Primary side pressure | 0.1～0.3MPa | ||
| Inlet/outlet differential pressure | 0.05MPa | ||
| Cooling water volume | 10L/min | ||
| Cooling water temperature | 5 to 30℃ | ||
| Suction diameter JIS B 2290 | Corresponds to VG250 | Corresponds to VG300 | |
| Exhaust port diameter JIS B 2290 | Equivalent to VF150 | Equivalent to VF200 | |
| External dimensions L x W x H *5 |
772 x 1182 x 680mm | 772 x 1452 x 680mm | |
| Weight | 970kg (without motor) |
1100kg (without motor) |
|
| Standard backing pump | PKS-070 | PKS-070 x 2 | |
Note) SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure：6.7×10-1 Pa = 5×10-3 Torr,
Pressure：0.05/0.1/0.2/0.3 Mpa = ~0.5/0.1/2/3 atmospheres
*1 Measured value at 13 Pa
*2 Measured by pirani vacuum gauge (with standard backing pump and oil).
The value would be 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge.
*3 00 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*4 Pump oil types other than the standard type are available. Contact ULVAC.
*5 W = width, D = depth, H = height