By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.


  • Oil-free
    No oil in the pump casing, results in stable performance even when evacuating water vapor or solvent vapors.
  • Canned motor
    Using of canned motor could avoid using mechanical seal between atmosphere and vacuum. It can be used in clean environment without oil leak concern.
  • Excellent Corrosion Resistant Surface Treatment
    Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent scratch and corrosion inside the pump. Nonsurface treatment can be selected as option.
  • Atmospheric Pressure Start type for Shorter Evacuation Type (Option: Inverter)
    This type can shorten pumping time compared with standard type because the pump starts at the same time of roughing pump.


  • Evaporation, sputtering, ion plating,Vacuum dryer, freeze dryer, vacuum degassing
  • Analytical instruments, leak test system,Gas exchange, filling, vacuum insulating
  • Heat treatment, melting furnace
  • Other various kind of vacuum system


PRC-003A PRC-006A PRC-012A PRC-018A
Maximum pumping speed 50Hz m3/h(L/min) 280(4670) 500(8330) 1000(16700) 1500(25000)
60Hz 330(5500) 600(10000) 1200(20000) 1800(30000)
Maximum suction pressure 50Hz Pa 1.2 x 103 1.3 x 103 1.2 x 103
60Hz 9.3 x 102 1.1 x 103 9.3 x 102
Maximum allowable differential pressure 50Hz Pa 4.0 x 103 7.3 x 103 4.3 x 103
60Hz 3.3 x 103 6.0 x 103 3.2 x 103
Ultimate pressure *1 Pa 4.0 x 10-1 6.7 x 10-1
Allowable drive pressure Pa ~1.0 x 105(atmospheric pressure start type)
Motor *2 kW 0.75(2) 2.2(2) 3.7(2) 5.5(2)
Oil *3 ULVOIL R-4
Oil quantity L 0.7 1.5 1.9
Cooling method Water cooling
Cooling water Primary side pressure MPa 0.3
Inlet/outlet differential pressure Volume MPa 0.01<
Inlet/outlet differential pressure Volume L/min 2 3
Temprature *4 5 ~ 30
Inlet port JIS-B-2290 VG80 / ISO80F(optional) VG80(optional) VG150(optional)
Outlet port JIS-B-2290 VF80(optional) VF100(optional)
Dimension(W×D×H) mm 296×575×260 356×619×320 406×759×340 406×989×340
Weight total kg 51 86 118 150
Standard roughing pump *5 VD601 VD901 VS1501 VS2401
Optional adapter flange, atmospheric pressure start type (Inverter), lubrication oil, lubrication chamber evacuation

*1 Measured by Pirani vacuum gauge. It will be about 4.0 x 10-2Pa when measured by MacLeod vacuum gauge.
*2 AC200V (50Hz/60Hz), AC220V (60Hz), 3Phase. Other voltage is available upon request.
*3 Synthetic (R-7000) or fluorine oil (J25F) is selectable as option
*4 Please use it in the environment of no be dewy when the temperature of cooling water is low.
*5 erformance of these pumps could change depending on roughing pump. Above data is based on standard roughing pump.

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Mechanicals Booster Pump PRC Series