By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.
No oil in the pump casing, results in stable performance even when evacuating water vapor or solvent vapors.
- Canned motor
Using of canned motor could avoid using mechanical seal between atmosphere and vacuum. It can be used in clean environment without oil leak concern.
- Excellent Corrosion Resistant Surface Treatment
Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent scratch and corrosion inside the pump. Nonsurface treatment can be selected as option.
- Atmospheric Pressure Start type for Shorter Evacuation Type (Option: Inverter)
This type can shorten pumping time compared with standard type because the pump starts at the same time of roughing pump.
- Evaporation, sputtering, ion plating,Vacuum dryer, freeze dryer, vacuum degassing
- Analytical instruments, leak test system,Gas exchange, filling, vacuum insulating
- Heat treatment, melting furnace
- Other various kind of vacuum system
|Maximum pumping speed||50Hz||m3/h(L/min)||280（4670）||500（8330）||1000（16700）||1500（25000）|
|Maximum suction pressure||50Hz||Pa||1.2 x 103||1.3 x 103||1.2 x 103|
|60Hz||9.3 x 102||1.1 x 103||9.3 x 102|
|Maximum allowable differential pressure||50Hz||Pa||4.0 x 103||7.3 x 103||4.3 x 103|
|60Hz||3.3 x 103||6.0 x 103||3.2 x 103|
|Ultimate pressure *1||Pa||4.0 x 10-1||6.7 x 10-1|
|Allowable drive pressure||Pa||～1.0 x 105（atmospheric pressure start type）|
|Oil *3||ULVOIL R-4|
|Cooling method||Water cooling|
|Cooling water||Primary side pressure||MPa||0.3|
|Inlet/outlet differential pressure Volume||MPa||0.01<|
|Inlet/outlet differential pressure Volume||L/min||2||3|
|Temprature *4||℃||5 ～ 30|
|Inlet port JIS-B-2290||VG80 / ISO80F(optional)||VG80(optional)||VG150(optional)|
|Outlet port JIS-B-2290||VF80(optional)||VF100(optional)|
|Standard roughing pump *5||VD601||VD901||VS1501||VS2401|
|Optional||adapter flange, atmospheric pressure start type (Inverter), lubrication oil, lubrication chamber evacuation|
*1 Measured by Pirani vacuum gauge. It will be about 4.0 x 10-2Pa when measured by MacLeod vacuum gauge.
*2 AC200V (50Hz/60Hz), AC220V (60Hz), 3Phase. Other voltage is available upon request.
*3 Synthetic (R-7000) or fluorine oil (J25F) is selectable as option
*4 Please use it in the environment of no be dewy when the temperature of cooling water is low.
*5 erformance of these pumps could change depending on roughing pump. Above data is based on standard roughing pump.