ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.
It is used in a wide range of applications, from research to manufacturing line.
Features
- Designed for large critical back-pressure
- Extremely stable performance at pressures down to 10-2 Pa (10-4 torr)
- Use hose flanges (except for vent flanges on ULK-04A and 06A)
- Pumps can be cleaned easily (parts can be disassembled easily).
- Come with mechanism to stop flow of operating fluid to auxiliary pump.
Specifications
| Model | ULK-04A | ULK-06A | ULK-10A | ULK-14A | |||||
| Pumping speed(L/sec) | 550 | 500 | 1200 | 1100 | 3400 | 3000 | 5400 | 4900 | |
| Ultimate pressure(Pa)*1 | ＜2.6×10-5 | ＜2.6×10-6 | ＜2.6×10-5 | ＜2.6×10-6 | ＜2.6×10-5 | ＜2.6×10-6 | ＜2.6×10-5 | ＜2.6×10-6 | |
| Maxium forepressure(Pa) | 40 | 60 | 40 | 60 | 35 | 40 | 30 | 30 | |
| Heating up time(min) | 9 | 8.5 | 16.5 | 15 | 20 | 20 | 25 | 25 | |
| Oil*4 | ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 | ULVOIL D-31 | |
| Oil capacity(L) | 0.15 | 0.35 | 0.8 | 1.5 | |||||
| Cooling water temperature(℃) | 19℃～25℃ | ||||||||
| Water connections | Rc 1/4" | Rc 1/4" | Rc 3/8" | Rc 3/8" | |||||
| Water capacity(L／min) | 1 | 1 | 1 | 1.5 | 2.5 | 3 | 2.5 | 3.5 | |
| Voltage | 200V/1Φ | ||||||||
| Pump power(kW) | 0.55 | 0.73 | 0.9 | 1.2 | 2 | 2.4 | 2.25 | 2.4 | |
| Heater type | Plate | Plate | Plate | Plate | |||||
| Standard backing pump*2 | VD151/VD201 PVD-180/PVD-360 |
VD30C/VD40C/VD60C | VD90C VS1501 PKS-016/PKS-030 |
VS1501/VS2401/PKS-030 | |||||
| Dimensions*3(mm) | A | 175 | 250 | 340 | 340 | ||||
| B | 150 | 180 | 240 | 240 | |||||
| H | 344 | 449 | 650 | 670 | |||||
| Inlet | VG100 | VG150 | VG250 | VG350 | |||||
| Outlet | VG25 | VG40 | VG80 | VG80 | |||||
| Weight(kg) | 7.5 | 13.5 | 47 | 56 | |||||
| Oil level gage | Without | Without | Slight glass | Slight glass | |||||
| Themal switch option | With | With | With | With | |||||
| Themal switch operating temperature(℃) | 250 | 250 | 180 | 180 | |||||
*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.
*4 D-11 is hydrocarbon-based general-purpose oil.D-31 is the silicon-based diffusion pump oil which heat-resistant stability is high in.