The PVD series are belt-driven compact rotary vacuum pumps with outstanding evacuation characteristics. They are used by a large number of ULVAC customers.


  • Consistent pumping performance
  • Low vibration and low noise
  • Because the pump body is machined from a single aluminum block casting the unit has fewer parts to maintain.
  • Oil-backflow prevention(PVD-B series)


Model *1 PVD-180(B) PVD-360(B)
Design pumping speed 50Hz 9m3/h(155L/min) 19m3/h(310L/min)
60Hz 11m3/h(186L/min) 22m3/h(372L/min)
Final pressure *2 6.7 x 10-1Pa
Motor (number of poles) *3 0.4kW(4P) 0.75kW(4P)
Motor speed 50Hz 500rpm
60Hz 600rpm
Required oil volume 0.3L 0.5L
Oil *4 ULVOIL R-7
Cooling method Air-cooled
Intake pipe size inner diameter x outer diameter Φ28mm x Φ19mm Φ34mm x Φ27mm
Vent pipe size (JIS pipe screw thread) G3/4(PF3/4) G1(PF1)
Weight (pump + base) 33.5kg 43kg
External dimensions W x D x H 235 x 450 x 321mm 275 x (500) x 321mm
Standard accessories Base, belt cover, motor pulley, V-belt, oil for 1 pump
Options TMX-1 oil mist trap, oil mist trap adapter, C-1/2 base with handle and casters

This specification uses SI measurement units. Conversion to non-SI units is as follows
Final pressure : 6.7 x 10-1 Pa = 5 x 10-3 torr

*1 PVD-B series models : PVD-180B and PVD-360B are versions of PVD-180 and PVD-360 with oil backflow prevention mechanisms.
*2 Measured by pirani vacuum gauge (about 6.7 x 10-2 Pa with macLeod vacuum gauge)
*3 When ordering, specify whether you require a motor, and if you do, specify its type, voltage and frequency. Totally enclosed fan-cooled motors, increased safety motors, and explosion-proof motors are available as options. (Except PVD-B series)
*4 Other oil types are available. Contact ULVAC's Sales Department.

Catalog Download

Oil Rotary Vacuum Pump PVD Series