VS series is a single-stage oil rotary vacuum pump coupled with a direct-drive motor. ULVAC's simplified design gives this lightweight pump the features of compact size along with low vibration operation. The substantial reduction in vibration of the VS series pump can help reduce the costs associated with having to perform special foundation work in facilities where vibration can be problematic. Additionally, enhancements in both the oil circulation and cooling systems result in increased stability of pumping performance at high inlet pressures. These VS series pumps are typically used in a wide range of applications, especially those having a large number of repetitive pumping steps that cycle from atmospheric pressure, such as in the automated leak testing of parts, as well as numerous other industrial applications.


  • Low vibrations and noise
  • Lightweight, compact
  • Enable continuous operation at full pressure
  • Outstanding ease of maintenance


  • Evaporation, sputtering, ion plating
  • Vacuum packaging, vacuum adhesion, transport
  • Vacuum heat treatment furnaces, sintering furnaces, brazing furnaces, brazing
  • Vacuum drying, freeze-drying, vacuum deairing
  • Gas substitution/supply, vacuum insulation
  • Automated leak testing, etc.


Model VS1501 VS2401
Design evacuation speed 50Hz 150m3/h(2500L/min) 240m3/h(4000L/min)
60Hz 180m3/h(3000L/min) 288m3/h(4800L/min)
Final pressure *1 5.3Pa
Motor *2 Type Totally enclosed fan cooled motor
number of poles 5.5kW(4P) 7.5kW(4P)
Voltage/frequency 200V/50,60Hz 220V/60Hz
Required oil volume 8.0~10.5L
Oil *3 ULVOIL R-7
Cooling water Pressure ≦ 0.5MPa (gauge pressure)
Flow rate 4L/min 5L/min
Temperature 5~30℃
Intake size JIS B 2290 VG80 size
Vent size JIS B 2290 VG50 size
External dimensions W x D x H 940 x 352 x 460mm 1062 x 352 x 460mm
Weight *4 240kg 280kg
Standard accessories Motor (attached), oil for 1 pump,
operating instructions (1 copy)
Options Oil mist trap, gas ballast valve, oil return mechanism

SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure: 5.3Pa=4 x 10-2 Torr
Cooling water presuure: 0.5MPa=5kg/cm2

*1 Measured by pirani vacuum gauge
*2 Options: The pump is also compatible with a increased safety explosion-resistant motor and pressure-proof explosion-resistant flange motor.
*3 Other oil types are available, upon request.
*4 Values in parentheses indicate the weight of the pump unit only.

Catalog Download

Oil Rotary Vacuum Pump VS series