- Low vibrations and noise
- Lightweight, compact
- Enable continuous operation at full pressure
- Outstanding ease of maintenance
- Evaporation, sputtering, ion plating
- Vacuum packaging, vacuum adhesion, transport
- Vacuum heat treatment furnaces, sintering furnaces, brazing furnaces, brazing
- Vacuum drying, freeze-drying, vacuum deairing
- Gas substitution/supply, vacuum insulation
- Automated leak testing, etc.
|Design evacuation speed||50Hz||150m3/h(2500L/min)||240m3/h(4000L/min)|
|Final pressure *1||5.3Pa|
|Motor *2||Type||Totally enclosed fan cooled motor|
|number of poles||5.5kW(4P)||7.5kW(4P)|
|Required oil volume||8.0～10.5L|
|Oil *3||ULVOIL R-7|
|Cooling water||Pressure||≦ 0.5MPa (gauge pressure)|
|Intake size||JIS B 2290||VG80 size|
|Vent size||JIS B 2290||VG50 size|
|External dimensions W x D x H||940 x 352 x 460mm||1062 x 352 x 460mm|
|Standard accessories||Motor (attached), oil for 1 pump,
operating instructions (1 copy)
|Options||Oil mist trap, gas ballast valve, oil return mechanism|
SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure: 5.3Pa=4 x 10-2 Torr
Cooling water presuure: 0.5MPa=5kg/cm2
*1 Measured by pirani vacuum gauge
*2 Options: The pump is also compatible with a increased safety explosion-resistant motor and pressure-proof explosion-resistant flange motor.
*3 Other oil types are available, upon request.
*4 Values in parentheses indicate the weight of the pump unit only.