A titanium getter pump is oil free and has an excellent maintainability. It provides an extra-high vacuum when used in combination with an ion pump.
PST Series
Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.