The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.
Features
- There is not limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system.
- Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
- Excellent anti-corrosion surface treatment. Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
- Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products.
- Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.
Applications
- Main evacuation of middle to hard processes such as dry etching, CVD system, etc.
Specifications
| Wide range and high throughput models | High back-pressure and high compression models | Inlet flange size | N2pumping speed(L/s) *1 *2 |
| - | UTM-6300FH | VG500 | 6300 |
| UTM-3301FW | UTM-3303FH | VG350 | 3300 |
| UTM-2300FW | - | VG300 | 2730 |
| VG250 | 2230 | ||
| ICF305 | 2110 | ||
| UTM-1400FW | - | VG250 | 1490 |
| VG200 | 1360 | ||
| ICF253 | 1300 | ||
| UTM-1001FW | UTM-1001FH | VG200 | 1000 |
| ICF253 | 1000 | ||
| UTM-800FW | UTM-800FH | VG150 | 810 |
| ICF203 | 740 | ||
| UTM-480FW | UTM-480FH | VG150 | 480 |
| ICF203 | 480 | ||
| UTM-350FW | UTM-350FH | VG100 | 350 |
| ICF152 | 330 |
| *1 | Value measured in accordance with JVIS005 standard, or calculated value based on it |
| *2 | Protective mesh isn't used. |