A variation of Qulee, adding new features in response to customer needs. By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for process management and residual gas analysis.
Features
- Excellent Cost Performance
Provides gas analysis with an optional differentialpumping unit - Compact Design
Utilizes standard vacuum unit model desktop YTP - Integrated Display Unit Design
Provides visual data without need for a PC - Easy to Operate
One-click function for easy operation, no complex procedures - Atmospheric Pressure Analysis
Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
(22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr/30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar) - Select a Model Depending on your Application
Select from the mass numbers 1 to 100 (BGM2-101/102), 1 to 200(BGM2-201/202), 1 to 300(HGM2-302) - Low noise
43dB(A) or less at Ultimate pressure - Pressure indication
Designed for easy integration of 2 vacuum gauges - Complete Leak Test Function
Helium leak test, air leak test, leak up test - Qulee QCS Ver.4 (Ethernet compatible)
Software included (Windows 7/8/10)
Applications
- Various types of gas analysis for research and development
- Gas monitoring of PVD system during processing
Residual gas analysis in PVD system - Residual gas analysis for high vacuum pumping equipment, etc.
Specifications
| Qulee main body | Select from Qulee BGM2-101/102/201/202, HGM2-302 | |
| Max sampling pressure | Select from atmospheric pressure 3000Pa/500Pa/100Pa/10Pa/1Pa | |
| Select from atmospheric pressure 22.5Torr/3.75Torr/0.75Torr/7.5×10⁻²Torr/7.5×10⁻³Torr | ||
| Select from atmospheric pressure 30mbar/5mbar/1mbar/0.1mbar/1.0×10⁻²mbar | ||
| Gas induction (500 to 1Pa type/3.75 to 7.5×10⁻³Torr type/5 to 1.0×10⁻²mbar type) | Manual bellows valve・Flange ICF070 | |
| Atmospheric pressure type | Please contact us for the detailed specification on separately. | |
| Pump unit Desktop YTP
(YTP70A-D) |
TMP | Pumping speed 70L/s(N₂) |
| Dry pump | Pumping speed 20L/min | |
| Ultimate pressure | Below 10⁻⁶Pa (7.5 × 10⁻⁹ Torr, 1.0 × 10⁻⁸ mbar) (value after TMP bale out) | |
| Input voltage | Single phase AC100 ~ 240V, 300W | |
| Software | Qulee QCS Ver.4.0 (Windows 7/8/10) | |
| Optional accessories | Ioniation gauge package (SH-1, Sensor head cable 2m,Cross tube,Bolts,Gaskets),Carry cart,USB-LAN adapter,Switching hub(8 ports or 16 ports) | |