Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.
Features
- Controller integrated with the pump body
No wiring work between pump body and controller. - Free mounting direction
Free mounting direction makes the system design flexible. - 5 models from 1000L/s to 4000L/s class.
- Wide range and high flow for the light processes.
- Pump rotation variable from 25% to 100%
Enabling the pressure adjustment in a chamber. - High durability and safety
Safety confirmation tests are passed, such as air
rushing-in test and touch down test.
Applications
-
- Main vacuum pumping system for equipment
・Semiconductor equipment
・Evaporator,Sputtering system
・Analytical equipment,Experimental device and etc. - Main vacuum pumping system for the light processes that do not generate side reaction products.
- Replacement from oil diffusion pumps
- General use for high vacuum evacuation system.
- Main vacuum pumping system for equipment
Specifications
| Model | UTM1200A | UTM1600A | UTM2300A | UTM3400A | ||
| Inlet port | VG150 ISO160F |
VG200/VG250 ISO200F/ISO250F |
VG250 ISO250F |
VG300/VG350 ISO320F |
||
| Outlet port | KF40 | |||||
| Ultimate pressure(*1) | Pa | 10-7 | ||||
| Pumping speed (*2)(*3) | N2 | L/s | 1030 | 1400 | 2100 | 3200 |
| Ar | L/s | 980 | 1330 | 2000 | 3100 | |
| H2 | L/s | 660 | 750 | 1380 | 2100 | |
| Compression rate | N2 | 2×108 | ≧ 1×108 | ≧ 1×109 | ||
| He | 7×103 | 5×103 | 1×105 | |||
| H2 | 8×102 | 9×102 | 6×103 | |||
| Max inlet pressure(*4) | Pa | 26 | 4.5 | 7 | ||
| Max outlet pressure(*4) | Pa | 266 | 200 | 270 | ||
| Rotation speed | min-1 | 37200 | 33700 | 27600 | ||
| Speed variation | Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%） | |||||
| Start-up time | ≦ 8minutes | ≦ 9minutes | ≦ 16minutes | |||
| Mounting position | In any desired direction | |||||
| Surface treatment(*5) | None | |||||
| Commun ication | Contact | D-sub 25 pin female Contact input and output signal | D-sub 37 pin female Contact input and output signal | |||
| Serial | Serial connecter RS232C/RS485 | D-sub 9 pin male RS232C/RS485 | ||||
| Controller | Composition | Pump with integrated controller | ||||
| Input electric power | Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz） | |||||
| Max power | 0.75kVA | 1.2kVA | ||||
| Cooling method | Water cooled | |||||
| Cooling water(*6) | Flow rate | L/min | 3～4 | |||
| Pressure | MPaG | 0.2 ～ 0.4 | ||||
| Noise | dB(A) | 57 | 60 | |||
| Weight | kg | 43 | 41 | 56 | 94 | |
| Recommended backing pump(*7) | ≧ 600L/min | ≧ 1500L/min | ||||
| Applicable standard | CE、TUVus | |||||
| Standard accessories | O-ring(Only VG)、Dust cap(Outlet port)、Remote-control Connector、Instruction manual(CD-ROM) | |||||
| Select parts | AC Cable | AC Conector / AC Cable(5m/10m/15m/20m) | ||||
| Special bolt for fixing pump | M10(Non-RoHS / RoHS)/ M12(Non-RoHS / RoHS) | |||||
| Special bolt for fixing pump | Need（M10）（*8） | Not Need（*8） | ||||
| Option | Gas purge adaptor (KF10) | |||||
*1：digit number is expressed.
*2：Without a protective net.
*3：Calculated values:UTM2300A and UTM3400A
*4：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
*5：Do not flow reactive gas and corrosive gas. Please contact us when using other gases.
*6：Not condensing
*7：When evacuating 30SCCM
*8：Grade of bolts,Fixing method and etc. are subject to various conditions. Please contact us for the detailed information.