YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible. ULVAC prepares two types, SA type which allows the automatic pumping by START / STOP switch and M type which is a manual operation. In addition, the back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
Features
- Preparing various models according to the application
The back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection. - Adopting a superior power failure countermeasure function
A solenoid valve is equipped as standard on the fore valve to prevent reverse flow and failure at power failure. - Possible to check the pressure during rough vacuum pumping due to the Pirani vacuum gauge is equipped as a standard parts.
- Vacuum pumping to the Ultra High Vacuum area is possible
Designed for easy integration of up to 2 vacuum gauges
(※ As product specification value)
Applications
- Evacuation system from atmospheric pressure to high vacuum
- Evacuation system of various experiment and R&D equipments
- Vacuum substitution of high purity gas
- Roughing evacuation system of UHV system
- Evacuation system of analytical equipment
Specifications
Model | YTP-50MB YTP-50SAB |
YTP-50MB-DRY YTP-50SAB-DRY |
YTP-300MB YTP-300SAB |
YTP-300MB-DRY YTP-300SAB-DRY |
|
Inlet port | ICF114 | ICF152 | |||
VG65 | VG100 | ||||
ISO63-K | ISO100-K | ||||
TMP Ultimate pressure *1,*2 | Before baking | 10-6Pa | 10-6Pa | ||
After Baking | 10-8Pa | 10-8Pa | |||
TMP Pumping speed(L/s)*3 | N2 | 70 | 280 | ||
H2 | 49 | 220 | |||
Baking pump Outlet port | G3/4 | NW16 | G1 | NW16 | |
Baking pump Pumping speed(L/min) | 50Hz | 50 | 90 | 200 | 250 |
60Hz | 60 | 100 | 240 | 300 | |
TMP back pressure and rough pressure monitering | Pirani vacuum gauge(2.7×103~10-1Pa) | ||||
Fore valve | Solenoid valve for rotary pump automatic vent system(Solenoid valve) | ||||
Input power source | Single phase AC100V(50/60Hz) | ||||
Input cable length | 5m with 3P outlet | ||||
Power capacity(kVA) | 1.2 | 0.9 | 1.7 | 1.6 | |
Power consumption during stable operation(kVA) | 0.6 | 0.4 | 1.0 | ||
Weight(kg) | 55 | 57 | 86 | 85 |
*1:Baking is only available with ICF flange type.
*2:A digit number is expressed.(Display only the digits of power.)
*3:Without a protective net.