VAH series is a manually operated high vacuum gate valve that was developed based on a wealth of technology and experience in the vacuum field. The conductance can be easily adjusted.
Features
- O-ring shaft seals draw little air into valves.
- Simpler structure makes maintenance easy.
- Use of aluminum alloy enables more lightweight design.
- Use of link mechanism enables more compact design.
- Low vibrations
- Low cost
Applications
- Evacuation system lines on vacuum equipment
Specifications
| Model | VAH |
| Nominal size A(B) | 100A(4B), 150A(6B) |
| Valve material | Aluminum alloy (internal parts: mild steel, nickel plating) |
| Gasket material | Nitryl rubber |
| Permitted baking temperature (℃) | <60 |
| Operating pressure range (Pa) | 105 to 10-5 |
| Leak rate (Pa・m3/s) | <7.0×10-9 (*1) |
| Permitted ambient temperature (℃) | 5 to 40 |
| Operation type | Manual |
| Back-pressure | Supported as standard feature |
| Remarks | Fluororubber parts are available (option) |
Note：1. This specification uses SI measurement units.
Conversion to non-SI units is as follows：1Pa=7.5×10-3Torr
2. Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 1000 Pa.
*1a：Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate.
*1b：Air adhering to shaft may be drawn in during valve operation, increasing apparent leak rate.