ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
Features
- Due to ULVAC's unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.
- The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
- The ULVAC VFR series valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).
Applications
- Large display manufacturing systems
- OLED manufacturing systems
- Other vacuum systems as main valve and gate valve
Specifications
| Model | VFR-400 | VFR-500 | |
| Common port diameter | Φ400mm | Φ500mm | |
| Flange specification (JIS B2290 equivalency) |
VF400 | VF500 | |
| Open/close specification | 2 positions | ||
| Open/close operation principle | Pneumatic | ||
| Open/close time | 8sec | 12sec | |
| Valve plate seal | Reverse pressure capable | ||
| Open conductance | 50000L/s | 90000L/s | |
| Pressure range | 1.0×10-5Pa～0.12MPa(abs) | ||
| Allowable baking temperature （at stopped） |
Valve body : < 120℃ Cylinder : < 80℃ Valve body : < 248F Cylinder : < 176F |
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| Allowable ambient temperature | 10 to 80℃ 50 to 176F |
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| Allowable Gass temperature | 10 to 80℃ 50 to 176F |
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| Compressed air pressure | 0.50 to 0.70MPaG 72.5 to 101.5psi 5.0 to 7.0bar |
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| Compressed air supply port | Φ8 tube connection | ||
| Maintenance cycle | 100,000 | ||
| Mouting angle | Free | ||
| Main parts material | Valve body : AC4CH-T6 Seal plate : AC4CH-T6 |
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| Seal material | Vacuum side：FPM | ||
| Oil | Z300 | ||
| Weight | 98kg | 155kg | |
| Flange to flange dimension | 150mm | 170mm | |