ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.


Maximum allowable differential pressure on valve plate
(Positive pressure/counter pressure) MPa
Maximum allowable differential pressure in opening direction
(Positive pressure/counter pressure) MPa
Plate seal O-ring
Feedthrough O-ring
Actuation Double-acting cylinder
External leak rate*1 Pa・m3/s ≦1.0E-10
Internal leak rate*1 Pa・m3/s ≦1.0E-10
Operating pressure range
(absolute pressure) Pa
Atm. ~ 1.0E-5
Bakeout temperature
(when stopping)*2 ℃
Body:150*3, actuation:70 (Indicator: 60)
Operating ambient temperature ℃ 5~70
Fluid temperature ℃ 5~70
Heating & cooling speed ℃/h ≦30
Operating ambient Non-corrosive
Fluid Non-corrosive
Compressed air to cylinder MPaG 0.40 ~ 0.60
Warranted operation cycle*4 100,000
Orientation No limitation
Position indicator Optional (sell separately)
Material of major parts (Vacuum side) Stainless steel 304
Material of major parts (Atmosphere side) Stainless steel 304, Aluminum-6061 (anodized aluminum)
Bellows material
Seal material (Vacuum side) FKM
Grease (Vacuum side) Fluorine grease
Attachment for lifting None*5
RoHS Complied

*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3  Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200℃ (392F) and in closing position: 150℃ (302F).
*4 See instruction manual for detail.
*5  Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).

Category Chart

Type Category Series
Vacuum angle valve VLP vacuum angle valve (double acting) VLP-SA vacuum angle valve (double acting /stainless/O-ring shaft feedthrough)
VLP-SB vacuum angle valve (double acting /stainless/bellows shaft feedthrough)
VLP-MB vacuum angle valve (double acting /stainless/ultra-high vacuum)
VLP-U vacuum angle valve (double acting/iron/O-ring shaft feedthrough)
VLB vacuum angle valve (single acting) VLB-SA vacuum angle valve (single acting /stainless/O-ring shaft feedthrough)
VLB-SB vacuum angle valve (single acting /stainless/bellows shaft feedthrough)
VLH vacuum angle valve (manual) VLH-SB vacuum angle valve (manual/stainless/bellows shaft feedthrough)
VLH-MB vacuum angle valve (manual /stainless/ultra-high vacuum)

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VLP Series