ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Specifications
| Model | VLP-SA/SB/MB |
| Maximum allowable differential pressure on valve plate (Positive pressure/counter pressure) MPa |
0.10 |
| Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa |
0.10 |
| Plate seal | O-ring |
| Feedthrough | O-ring |
| Actuation | Double-acting cylinder |
| External leak rate*1 Pa・m3/s | ≦1.0E-10 |
| Internal leak rate*1 Pa・m3/s | ≦1.0E-10 |
| Operating pressure range (absolute pressure) Pa |
Atm. ～ 1.0E-5 |
| Bakeout temperature (when stopping)*2 ℃ |
Body：150*3， actuation：70 (Indicator: 60) |
| Operating ambient temperature ℃ | 5～70 |
| Fluid temperature ℃ | 5～70 |
| Heating & cooling speed ℃/h | ≦30 |
| Operating ambient | Non-corrosive |
| Fluid | Non-corrosive |
| Compressed air to cylinder MPaG | 0.40 ～ 0.60 |
| Warranted operation cycle*4 | 100,000 |
| Orientation | No limitation |
| Position indicator | Optional (sell separately) |
| Material of major parts (Vacuum side) | Stainless steel 304 |
| Material of major parts (Atmosphere side) | Stainless steel 304, Aluminum-6061 (anodized aluminum) |
| Bellows material | ー |
| Seal material (Vacuum side) | FKM |
| Grease (Vacuum side) | Fluorine grease |
| Attachment for lifting | None*5 |
| RoHS | Complied |
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200℃ (392F) and in closing position: 150℃ (302F).
*4 See instruction manual for detail.
*5 Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).
Category Chart
| Type | Category | Series |
| Vacuum angle valve | VLP vacuum angle valve (double acting) | VLP-SA vacuum angle valve (double acting /stainless/O-ring shaft feedthrough) |
| VLP-SB vacuum angle valve (double acting /stainless/bellows shaft feedthrough) | ||
| VLP-MB vacuum angle valve (double acting /stainless/ultra-high vacuum) | ||
| VLP-U vacuum angle valve (double acting/iron/O-ring shaft feedthrough) | ||
| VLB vacuum angle valve (single acting) | VLB-SA vacuum angle valve (single acting /stainless/O-ring shaft feedthrough) | |
| VLB-SB vacuum angle valve (single acting /stainless/bellows shaft feedthrough) | ||
| VLH vacuum angle valve (manual) | VLH-SB vacuum angle valve (manual/stainless/bellows shaft feedthrough) | |
| VLH-MB vacuum angle valve (manual /stainless/ultra-high vacuum) |