When used in combination with an oil rotary pump, dry pump or other roughing vacuum pump, this pump can increase the pumping speed at a pressure range in which the pumping speed of the roughing vacuum pump drops.
PRC Series
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.
PMB Ver. D Series
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
PMB Ver.C Series
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
MBS-053 Series
Toots type / Display by Actual Pumping Speed / With protective functions
YVM Series
YMV series is a frame unit for combining a mechanical booster pump and an oil rotary vacuum pump.
We prepared four types of frame units according to the pumping capacity.
The independent frame design emphasizes on the maintainability of pumps. This product is ideal for use in production facilities.
Note: Mechanical booster pump and oil rotary vacuum pump need to be purchased separately.