EB Power Supply whose circuit was stabilzed and performace is improved based on long time accumelated technology. We have EB evaporation sauce which has long-life filament in our lineup as well.
EB Source for Metal Film
EGN Series
EGN series is the easy maintenance electron beam evaporation source for metal evaporation which has flat top configuration without any structural object on the evaporating side of the metal material newly developed in consideration of maintainability.
EGL Series
Electron beam evaporation source EGL is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
EGK electron beam evaporation source is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements. This evaporation source has a hearth with a maximum input power of 5kW.
EB Source for Metal Film
EGO Series
EGO is a highly reliable EB gun that is designed based on technologies ULVAC has gained over many years.
EB Power Supply
HPS Series
Series of power generator that support electron beam evaporation sources and feature improvements in circuit stability and performance based on technologies ULVAC have accumulated over many years and our proven track record.
Option
Atmospheric Pressure Checker DTA Series
Optional atmospheric pressure detector for EB gun.
High Voltage Introduction Terminal BERH311A
Optional atmospheric pressure detector for EB gun.
