A vacuum pump that does not use oil or liquid in the vacuum chamber and able to provide a clean vacuum. It can be used for pressures in the range of atmospheric pressure up to ultimate pressure.
Screw Type Dry Vacuum Pump
LS Series
High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.
Multi-Stage Roots Type Dry Vacuum Pump
RDA Series
RDA Series can operate in all pressure zones from atmospheric pressure to reach.Reach performance equivalent to dry and oil rotary pump.Supports single phase / three phase power supply with one model.
LR/HR/UR Series
ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
CR Series
Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard(CE,cTUVus).Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and cylinder.
GR Series
Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.
Scroll Type Dry Vacuum Pump
DIS・DISL Series
Double wrap / terminal only (without cord) with switch / with thermal protector / with air flash
Diaphragm Type Dry Vacuum Pump
DA / DAT Series
This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling.
DAP Series
This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling.
DAU・MD Series
High vacuum type / Three-stages / with power cord / with switch / with thermal protector
DTC Series
Chemical type / 2-stage exhaust system / with thermal protector / Power supply cord with plug / with switch
