ULVAC provides various vacuum valves based on extensive technical knowledge. Use ULVAC’s valves for all atmospheric pressure through ultra high vacuum applications. Satisfaction guaranteed!

Vacuum Angle Valve

VLP Series

ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.

VLH Series

Stainless steel made valve from 5/8 ~ 6 inch. Manual cylinder with bellows feedthrough. Type of flange is JIS-VF, ISO-KF, ISO-K and ISO-CF.

Vacuum Gate Valve

VAP Series

The VAP Series are pneumatically-operated high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience.

VAH Series

The VAH Series are manual high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience.

Manual Valve

Pendulum Valve VFR Series

ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.