Vacuum Component

As a comprehensive vacuum product manufacturer, ULVAC is also dedicated to the development of components. ULVAC pursues cutting-edge vacuum technology while providing a wide range of product lines, extending from vacuum pumps and measurement and analysis equipment, to components, such as power generators for various types of deposition equipment and vacuum valves.

Vacuum Pump

ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. In addition to Oil Rotary Vacuum Pumps, Dry Vacuum Pumps also have a lineup for all areas, conditions, and applications, including Roots, Diaphragms, Pistons,Turbo Molecular Pumps, and Cryopumps

Vacuum Gauge

ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications.

Vacuum Valves

ULVAC provides various vacuum valves based on extensive technical knowledge. Use ULVAC’s valves for all atmospheric pressure through ultra high vacuum applications. Satisfaction guaranteed!

Helium Leak Detector

The HELIOT900 is our helium leak detector with; high speed pumping capability, user-friendly operation and guaranteed top performance in all kinds of leak testing situations.

Pocess Gas monitor

“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.

power supply

Power Generator ‘s ULVAC offers a variety of electronic guns and power supplies that support evaporation deposition technology.

Vacuum oil

When the vacuum pump oil is operated over a long period of time, its deterioration contributes to poor performance. Regularly check to see if the oil has decreased or if it is dirty and refill or replace it.

Oil mistrap

The trap to eliminate oil smoke exhausted from oil rotary vacuum pump.When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumpedsurement conditions, and applications.