ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications.
Transducer Type
Multi Ionization Gauge
Capable of connection of different measurement range sensor heads according to application.Significantly miniaturized compared to the previous series (56% reduction of controller volume). World’s smallest class. Set point setting, condition check, etc. by connecting PC/Android.
Pressure Sensor Unit
A pressure sensor unit that is adopting a semiconductor type thin-film element. By this can measure near to the atmospheric pressure (Gauge pressure : -100kPa～10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.
Ceramic Capacitance Manometer
he CCMT-D series is a capacitance manometer, which detects static electric capacitance occurring when a barrier membrane made of ceramic (alumina) is deformed by changes in gas pressure.
Atmosphere Pirani Gauge
This is a wide range pirani vaccum gauge which measures from atmospheric pressure to 5 x 10-2 Pa. In addition, this gauge removes control and display panels from traditional controllers, keeping the minimum necessary functions only, thus saving cost and space.
Smartphone-Direct Pirani Gauge
This is a pirani vacuum gauge which can measure degree of vacuum by connecting your smartphone directly with USB cable. No need for dedicated power supply and display.
Pirani Vacuum Gauge
The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).
Cold Cathode Ionization Gauge
G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected.Ease of maintenance reduces the cost of ownership.
Display Unit
This single channel vacuum gauge display is compatible with all G-TRAN series and CCM series sensors.Enables users to view system status at a glance.
General Purpose Type
Extremely High Vacuum Gauge
Hot cathode type ionization vacuum gauge with a Bessel Box type energy filter installed between the ion source and the ion collector. This design provides a measurement resolution of 0.5×10-10Pa by reducing the residual current due to soft X-rays and electron stimulated desorption (ESD) ions.
Ionization Gauge
This series is hot cathode type ionization vacuum gauge, capable of measuring pressure in the 9.9 to 5 x 10-8 Pa (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar)(Metal gauge, GI-M2), 6.7 x 10-1 to 10-6 Pa (5 x 10-3 to 9.75 x10-9 Torr, 6.7 x 10-3 to 1.3 x 10-8 mbar)(Glass gauge, GI-D7) range using triode tube or B-A type sensor heads
Pirani Gauge
irani vacuum gauge that works using the thermal conduction of gas. Digital output and set point output are provided standard, as vacuum system control features. To enable effective use of system panels, GP-2001G has been given a more compact design.